A Novel Method for Higher Order Aberration Correction in Electron Microscopes
نویسندگان
چکیده
منابع مشابه
Performance Estimation of a Real-time Aberration Correction System for Scanning Transmission Electron Microscopes
The resolution of a scanning transmission electron microscope remains 100 times worse than its theoretical limit owing to the spherical aberration of objective lens. Ikuta proposed a system to generate an aberration-free amplitude image and phase image using multiple small detectors with real-time signal processing. This study shows the performance optimization results of its signal processing ...
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ژورنال
عنوان ژورنال: Microscopy and Microanalysis
سال: 2017
ISSN: 1431-9276,1435-8115
DOI: 10.1017/s143192761700304x